| NO | Axis | Y-axis | X-axis | Z-axis |
|---|---|---|---|---|
| 1 | Model | SPSM-20 | ||
| 2 | Measurement area | 400mm | 400mm | 300mm |
| 3 | Pay load | 30Kg @ X-slide | ||
| 4 | Structure | Hybrid Type Stage | ||
| 5 | Materials | Granite base, Steel frame, Al slide | ||
| 6 | Guide Type | LM Guide | LM Guide | LM Guide |
| 7 | Motor Type | Linear servo moto | Rotary servo motor | |
| 8 | Optical Sensor | Optical linear encoder & metal scale | ||
| 9 | Sensor | < 10nm/count | < 10nm/count | < 100nm/count |
| 10 | Accuracy | ± 5 μm | ± 5 μm | ± 5 μm |
| 11 | Repeat accuracy | ± 5 μm | ± 5 μm | ± 5 μm |
| 12 | Flatness | ± 5 μm | ± 5 μm | ± 5 μm |
| 13 | Straightness | ± 5 μm | ± 5 μm | ± 5 μm |
| 14 | Speed | 300 mm/s | 300 mm/s | 50 mm/s |
15 |
Machine size |
720(L) x 700(W) x 1600(H), 500Kg |
||
※ Machine size and precision can be customized. To suit you needs.
